RotaQ ES
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd), and carbon evaporation.
Key Features
- Capable of achieving vacuum of 1 x 10⁻⁶ mbar
- Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt.
- Touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one instrument
- 16GB of memory can store more than 1000 recipes
- Multi-colour LED visual status indicator
Details
The Q150V S Plus is a turbomolecular-pumped sputter coater, optimised for high-vacuum applications, with an ultimate vacuum of 1 x 10⁻⁶ mbar. Together with the use of a wide-range Penning/Pirani gauge, this enables the sputtering of oxidising metals with ultra-fine grain sizes, which are suitable for high resolution imaging. Available sputtering targets include chromium, iridium and all noble metals.
More information
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