Q300T T Plus Triple Target, Large Chamber, Turbo-Pumped Sputter Coater
Fitted with three sputtering heads to ensure even metal deposition. Includes three 57 mm Ø x 0.3 mm chromium (Cr) sputter targets (TK8845). A 10826 flat rotation stage for 200 mm/8″ and 150 mm/6″ wafers is fitted as standard.
Rotary pump requirements
13034. Rotary pump. 5 m3/hr Pfeiffer Duo 6 two-stage rotary vacuum pump. Includes vacuum hose, coupling kit and oil mist filter.
Dry pumping options:
26907. Edwards dry scroll pump nXDS10i. Pumping speed: 11.4 m/3hr.
11540. VacuuBrand MD1 diaphragm pump.
Options and accessories
10357. Rotating 50 mm Ø specimen stage with adjustable tilt.
The platform has six specimen stub positions for 15 mm, 10 mm, 6.5 mm or 1/8″ pin stubs. Stage rotation speed is variable between preset limits. No rotation when in ‘single target’ mode.
Target-to-stage height is variable between 0-42 mm for the standard stage. When used with the extended height cylinder (optional accessory 10596) the target to stage height is an additional 87 mm.
10067. 50 mm Ø variable height specimen stage with six stub positions for 15 mm, 10 mm, 6.5 mm disc stubs.
10360. 50 mm Ø “Rotacota” stage. A rotary planetary-style stage with variable tilt angle from horizontal to 30º. The platform has six positions for either 15 mm, 10 mm, 6.5 mm disc stubs or 1/8″ pin stubs. Rotation speed is variable between preset limits. Depending on specimen height, this stage may require the optional extended height cylinder.
10358. 90 mm Ø specimen stage for glass microscope slides. Designed to hold two x 75 mm x 25 mm slides or a single 75 mm x 50 mm slide. The stage can alternatively accommodate up to six 1/8″ SEM pin stubs. The stage rotation speed is variable between preset limits and includes a gear box to allow the optional FTM to be used.
11520. Film thickness monitor (FTM). Including oscillator, feed-through, quartz crystal holder and one C5460 quartz crystal.
C5460. Spare quartz crystal.
10596. Extended height vacuum chamber 214 mm H (the standard chamber is 127 mm H). Recommended for increased source-to-specimen distance and for coating large specimens.
10422. Rotating vacuum spigot. Allows a more convenient connection of the vacuum pump hose to the rear of the Q300T T when bench depth is limited.
11223. A lockable emergency stop (e-stop) switch. This can be mounted on top of the system in a position easily accessible for the operator and has a key to release the knob after activation. The addition of the e-stop does not inhibit or replace the normal on/off switch function.
11577. Coating shields. To protect large surfaces from coating deposition – removable for ease of cleaning.
10428. Full range, active vacuum gauge. Capable of measurement over the range of 1,000 mbar to 5 x 10-9mbar. Typical ultimate vacuum of system is in the region of 5 x 10-5mbar. Must be factory fitted.
11289. Spares kit. Including: spare standard glass cylinder, three 57 mm Ø x 0.3 mm chromium (Cr) targets (TK8845), vacuum tubing with coupling insert, argon gas tubing, three sputter head magnets, rotary pump oil mist filter and fuses.
The Q300T T is fitted as standard with three 57 mm Ø x 0.3 mm chromium (Cr) targets (TK8845).
Other optional targets are available (three required) 0.1 mm thick unless otherwise stated.
SC502-314A. Gold (Au)
SC502-314A/0.2 mm. Gold (Au) 0.2 mm
SC502-314B. Gold/palladium (Au/Pd – 80:20)
SC502-314B/0.2 mm. Gold/palladium (Au/Pd – 80:20) 0.2 mm
SC502-314C. Platinum (Pt)
SC502-314C/0.2 mm. Platinum (Pt) 0.2 mm
SC502-314D. Nickel (Ni)
SC502-314E. Silver (Ag)
SC502-314G. Palladium (Pd)
SC502-314H. Copper (Cu)
TK8875. Aluminium (Al)
TK8869. Carbon (C) 1.5 mm
TK8845. Chromium (Cr) 0.3 mm
TK8862. Chromium (Cr) 1.5 mm
TK8900. Cobalt (Co)
TK8889. Gold (Au) 0.3 mm
TK8891. Gold/palladium (Au/Pd – 80:20) 0.3 mm
TK8907. Indium tin oxide (ITO) 3 mm
TK8899. Iridium (Ir) 0.3 mm
TK8897. Iron (Fe)
TK8905. Magnesium (Mg) 0.5 mm
TK8903. Molybdenum (Mo)
TK8893 Platinum (Pt) 0.3 mm
TK8887. Platinum/palladium (Pt/Pd – 80:20) 0.3 mm
TK8906. Tantalum (Ta)
TK8902. Tin (Sn)
TK8879. Titanium (Ti) 1.5 mm
TK8895. Titanium (Ti) 0.5 mm
TK8846. Tungsten (W) 0.5 mm
TK8867. Tungsten (W) 0.2 mm